APC Butterfly Valve - List of Manufacturers, Suppliers, Companies and Products

APC Butterfly Valve "PCA Series"

A structure that is difficult to contaminate inside the chamber! Reduces stress on the O-ring and achieves high durability performance.

The "PCA Series" is a valve capable of opening and closing, slow exhaust, and pressure regulation. The newly developed seat ring mechanism eliminates issues such as twisting and detachment of the O-ring attached to the flapper. Additionally, the flapper seal section is grease-free, making it less likely to contaminate the reaction chamber. By adopting the seat ring mechanism, we have reduced stress on the O-ring and achieved high durability. 【Features】 ■ Capable of opening and closing valves, slow exhaust, and pressure regulation ■ Pressure adjustment possible from low vacuum to high vacuum ■ Utilizes a newly developed seat ring mechanism ■ High durability: 3 million cycles of full open and full close operation ■ Reduction of internal by-products through unique heating ■ Excellent adaptability to processes with high by-product generation *KITZ SCT offers various solutions for fluid-related issues in semiconductor manufacturing. For more details, please refer to the PDF materials or feel free to contact us.

Company：KITZ SCT Corporation Tokyo Headoffice
Price：Other

valve
Pipe Fittings

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APC Butterfly Valve "PCVA Series"

Equipped with AUTO PID! APC butterfly valve that automatically adjusts to the specified target pressure.

Introducing the APC Butterfly Valve [PCVA Series] equipped with AUTO PID control. This product is an integrated valve and controller type APC butterfly valve, suitable for use in vacuum exhaust lines for semiconductor manufacturing. In semiconductor manufacturing lines, minute fluctuations in temperature and pressure can significantly impact product quality, making high-precision control essential. AUTO PID control offers advantages in high-precision control, rapid response, long-term stability, and resistance to disturbances, contributing to the stabilization of required processes in semiconductor manufacturing. The APC Butterfly Valve [PCVA Series] equipped with AUTO PID control can automatically reach the specified target pressure, contributing to the optimization and efficiency of semiconductor manufacturing processes. Specifically, the following controls are possible: ■ Pressure Control: Automatically adjusts to the specified target pressure. ■ Target Change: Responds to changes in target pressure values during pressure control. ■ Flow Variation: Capable of pressure control for flow rates other than the learned flow rate. ■ Disturbance Impact: Converges to the target pressure even if the flow rate changes during target pressure control. ■ Position Shift Detection: Capable of detecting position shifts due to product adhesion or mechanical issues.